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Gas Phase Etching

См. также в других словарях:

  • Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… …   Wikipedia

  • Deep reactive-ion etching — (DRIE) is a highly anisotropic etch process used to create deep penetration, steep sided holes and trenches in wafers, with aspect ratios of 20:1 or more. It was developed for microelectromechanical systems (MEMS), which require these features,… …   Wikipedia

  • Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

  • Plasma (physics) — For other uses, see Plasma. Plasma lamp, illustrating some of the more complex phenomena of a plasma, including filamentation. The colors are a result of relaxation of electrons in excited states to lower energy states after they have recombined… …   Wikipedia

  • Epitaxy — refers to the method of depositing a monocrystalline film on a monocrystalline substrate. The deposited film is denoted as epitaxial film or epitaxial layer. The term epitaxy comes from a Greek root ( epi above and taxis in ordered manner ) which …   Wikipedia

  • Xenon — (PronEng|ˈzɛnɒn [Xenon, entry in the Oxford English Dictionary, prepared by J. A. Simpson and E. S. C. Weiner, vol. 20, second edition, Oxford: Clarendon Press, 1989. ISBN 0 19 861232 X (vol. 20), ISBN 0 19 861186 2 (set.)] or IPAlink en|ˈziːnɒn… …   Wikipedia

  • spectroscopy — spectroscopist /spek tros keuh pist/, n. /spek tros keuh pee, spek treuh skoh pee/, n. the science that deals with the use of the spectroscope and with spectrum analysis. [1865 70; SPECTRO + SCOPY] * * * Branch of analysis devoted to identifying… …   Universalium

  • Sputtering — is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic ions. It is commonly used for thin film deposition, etching and analytical techniques (see below). Physics of sputtering Physical… …   Wikipedia

  • Quantum dot — Part of a series of articles on Nanomaterials Fullerenes …   Wikipedia

  • Chlorine trifluoride — Systematic name …   Wikipedia

  • Boron trichloride — Chembox new Name = Boron trichloride ImageFile = Boron trichloride 2D.png ImageName = Boron trichloride ImageFile1 = Boron trichloride 3D vdW.png ImageName1 = Boron trichloride IUPACName = Boron trichloride OtherNames = Boron(III) chloride… …   Wikipedia

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